| Brodie I., Muray J. The Physics of Micro-Nano-Fabrication 1992.pdf | 53.79 MB |
Textbook in PDF format
In this revised and expanded edition, the authors provide a comprehensive overview of the tools, technologies, and physical models needed to understand, build, and analyze microdevices. Students, specialists within the field, and researchers in related fields will appreciate their unified presentation and extensive references.
Preliminary Survey
Particle Beams: Sources, Optics, and Interactions
Plasmas: Physics and Chemistry
Layering Technologies
Pattern Generation
Microcharacterization
Limits to Nanofabrication
All Comments