Diebold A Handbook of Silicon Semiconductor Metrology 2001

Textbook in PDF format

The Handbook of Silicon Semiconductor Metrology is designed to serve as a reference to both the metrology and processing communities. The volume is intended for a broad audience, from research to development and manufacturing. Whenever possible, chapter authors have provided a description of the science of the measurement along with applications to the most recent materials and processes. Another appropriate title for this book would be The Science and Technology of Silicon IC Metrology. The more one knows about the science behind measurement technology, the better one is able to ensure that a given metrology method will provide useful and correct information. It can serve as an advanced reference and text for those studying the processes used in silicon integrated circuit (IC) manufacturing.
Metrology itself is a wide-ranging field. An overview is provided in the introductory chapter. Trends in the logistics of measurement technology such as integrated metrology are also covered in the introduction. The introduction conveys the following philosophy: Measurement data becomes a value for a physical parameter such as thickness only after a model is applied to the data and to the measurement instrument