GROWTH AND TRANSPORT IN NANOSTRUCTURED MATERIALS

Author: Angel Yanguas-Gil
Edition: 1st ed. 2017 edition
Publication Date: December 16, 2016
Publisher: Springer
ISBN-10: 3319246704
ISBN-13: 978-3319246703
Pages: 128 pages
Format: pdf
Size: 3.1M

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This book will address the application of gas phase thin film methods, including techniques such as evaporation, sputtering, CVD, and ALD to the synthesis of materials on nanostructured and high aspect-ratio high surface area materials. We have chosen to introduce these topics and the different application fields from a chronological perspective: we start with the early concepts of step coverage and later conformality in semiconductor manufacturing, and how later on the range of application branched out to include others such as energy storage, catalysis, and more broadly nanomaterials synthesis.

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