Vogel E. Thin Gate Oxide Reliability 2001

Textbook in PDF format

Physics, Statistics and Models.
Voltage, Electric Field, Current and Energy.
Effects of Stress on Oxides and Devices.
Physical Models of Wear-Out and Breakdown.
Percolation and Statistics of Breakdown.
Relability, Characterization and Test Methodology.
Accelerated Stress Tests.
Relability Extrapolation.
Extrinsic Oxide Breakdown